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Snis, Niklas
Publications (9 of 9) Show all publications
Johansson, S. & Snis, N. (2014). An ultrasonic motor for high-precision positioning. In: : . Paper presented at Actuators 2014, Bremen, Germany (pp. 647-650). Bremen: Messe Bremen
Open this publication in new window or tab >>An ultrasonic motor for high-precision positioning
2014 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
Bremen: Messe Bremen, 2014
National Category
Other Mechanical Engineering
Identifiers
urn:nbn:se:uu:diva-284759 (URN)978-3-933339-22-5 (ISBN)
Conference
Actuators 2014, Bremen, Germany
Available from: 2016-04-19 Created: 2016-04-19 Last updated: 2016-04-26
Edqvist, E., Snis, N., Casanova Mohr, R., Scholz, O., Corradi, P., Gao, J., . . . Johansson, S. (2009). Evaluation of building technology for mass producible millimetre-sized robots using flexible printed circuit boards. Journal of Micromechanics and Microengineering, 19(7), 11pp
Open this publication in new window or tab >>Evaluation of building technology for mass producible millimetre-sized robots using flexible printed circuit boards
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2009 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 19, no 7, p. 11pp-Article in journal (Refereed) Published
Abstract [en]

Initial tests of a building technology for a compact three-dimensional mass produciblemicrorobot are presented. The 3.9 × 3.9 × 3.3 mm3 sized prototype robot represents amicrosystem with actuators, sensors, energy management and integrated electronics. Theweight of a folded robot is 65 mg and the total volume is less than 23 mm3. The design of theinterfaces of the different modules in the robot, as well as the building technology, isdescribed. The modules are assembled using conductive adhesive with industrial surfacemounting technology on a thin double-sided flexible printed circuit board. The final shape ofthe microrobots is achieved by folding the flexible printed circuit board twice. Electrical andmechanical studies are performed to evaluate the assembly and it is concluded that thetechnology can be used for this type of microsystem. Several issues using the presentedassembly technique are identified and addressed.

Place, publisher, year, edition, pages
Institute of Physics Publishing, 2009
Keywords
microrobot surface mounting technologies microsystem autonomous flexible printed circuit boards
National Category
Manufacturing, Surface and Joining Technology
Research subject
Materials Science
Identifiers
urn:nbn:se:uu:diva-108482 (URN)10.1088/0960-1317/19/7/075011 (DOI)000267516800034 ()
Projects
I-SWARM
Available from: 2009-09-20 Created: 2009-09-20 Last updated: 2017-12-13Bibliographically approved
Edqvist, E., Snis, N. & Johansson, S. (2008). Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma. Journal of Micromechanics and Microengineering, 18(1), 015007
Open this publication in new window or tab >>Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma
2008 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 18, no 1, p. 015007-Article in journal (Refereed) Published
Abstract [en]

To fully utilize the actuator properties of poly(vinylidenefluoride) (P(VDF))-based polymers, the electric field has to be rather high and one way to accomplish this, in particular with low voltage drive signals, is to build multilayered structures. This paper focuses on how to structure poly(vinylidenefluoride-trifluoroethylene) P(VDF-TrFE) by presenting an etch method to create multilayered miniaturized actuators, with intermediate aluminium electrodes. To create inter-connect areas for the multilayer electrodes, a modified Bosch process in an inductive couple plasma (ICP) etcher is used to remove all P(VDF-TrFE) not covered by the electrodes. Since each electrode mask is slightly different from the others, the result is a staircase-like inter-electrode contact area that is connected from above using a conductive adhesive. The developed ICP etch results in high selective etching and a good agreement between theoretical and measured capacitance values. The manufactured cantilevers, consisting of a multilayer on top of a flexible printed circuit (FPC) board, were tested and the resonant stroke was confirmed to agree with expected values. The successful establishment of interlayer connections between the electrodes open up the possibility for batch fabrication of cheap low voltage micro actuators built on a standard substrate used in millions of commercial products. 2008 IOP Publishing Ltd.

Keywords
Multilayers, Actuators, Aluminum, Electric field effects, Electrochemical electrodes, Etching, Inductively coupled plasma, Microfabrication
National Category
Engineering and Technology
Identifiers
urn:nbn:se:uu:diva-108491 (URN)10.1088/0960-1317/18/1/015007 (DOI)000252965900009 ()09601317 (ISBN)
Available from: 2009-09-20 Created: 2009-09-20 Last updated: 2017-12-13
Snis, N., Edqvist, E., Simu, U. & Johansson, S. (2008). Monolithic fabrication of multilayer P(VDF-TrFE) cantilevers. Sensors and Actuators A-Physical, 144(2), 314-320
Open this publication in new window or tab >>Monolithic fabrication of multilayer P(VDF-TrFE) cantilevers
2008 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 144, no 2, p. 314-320Article in journal (Refereed) Published
Abstract [en]

When operating a piezoelectric actuator the use of multilayers has for a long time proven to be a good solution to maintain a high electric field at a reduced applied voltage. The piezoelectric copolymer polyvinylidene-trifluoroethylene P(VDF-TrFE) has rather low piezoelectric constant compared to piezoceramics but it can withstand much higher electric fields. As the copolymer can be spin coated the individual layer thickness of the multilayer can easily be reduced to a few m and rather large strains can be achieved at a moderate voltage. Here a monolithic fabrication technique for producing P(VDF-TrFE) actuators, without any lamination or adhesive layers, is presented. To fabricate the multilayer successive spin coating of the piezoelectric polymer polyvinylidene-trifluoroethylene P(VDF-TrFE) and electrode evaporation on a substrate was performed. Four different substrate materials were coated with a multilayer stack of 6 active P(VDF-TrFE) layers and 7 aluminum electrodes. The monolithic multilayer structures with patterned electrodes were diced by a cutting saw to produce unimorph cantilevers. No delamination or dissolution could be observed between adjacent copolymer layers. The cantilevers were evaluated in terms of static and resonant deflection and the Q-factor was estimated from the frequency spectra. A discussion regarding the influence of the Q-factor on the fabrication process tolerance is given. The different substrate materials used was stainless steel, flexible printed circuit board (FPC), polycarbonate and aluminum. The Q-factor varied from 30 for the polycarbonate to 83 for the stainless steel. These results provide guidelines for the material choices of a forthcoming locomotion module to be used in the 3 mm 3 mm 3 mm I-SWARM robots. The FPC substrate showed to have the best compatibility to the fabrication processes and the most suitable Q-value of 42. This together with the high deflections makes the FPC the preferred substrate materials the future actuators for the I-SWARM locomotion module. 2008 Elsevier B.V. All rights reserved.

Keywords
Piezoelectric actuators, Copolymers, Electric fields, Multilayers, Printed circuit boards, Spin coating
National Category
Engineering and Technology
Identifiers
urn:nbn:se:uu:diva-108492 (URN)10.1016/j.sna.2008.01.004 (DOI)000256896700010 ()09244247 (ISBN)
Available from: 2009-09-20 Created: 2009-09-20 Last updated: 2017-12-13Bibliographically approved
Edqvist, E. & Snis, N. (2006). I-SWARM, Mass Produced Miniaturized Autonomous Robots. In: : . Paper presented at Microstructure Workshop 2006, 9-10 May, Västerås, Sweden.
Open this publication in new window or tab >>I-SWARM, Mass Produced Miniaturized Autonomous Robots
2006 (English)Conference paper, Published paper (Refereed)
National Category
Engineering and Technology
Identifiers
urn:nbn:se:uu:diva-13318 (URN)
Conference
Microstructure Workshop 2006, 9-10 May, Västerås, Sweden
Available from: 2008-01-22 Created: 2008-01-22 Last updated: 2016-06-23Bibliographically approved
Snis, N., Edqvist, E., Simu, U. & Johansson, S. (2006). Multilayered P(VDF-TrFE) actuators for swarming robots. In: : . Paper presented at ACTUATOR 2006, 10th international Conference on New Actuators, 14-16 June 2006, Bremen, Germany.
Open this publication in new window or tab >>Multilayered P(VDF-TrFE) actuators for swarming robots
2006 (English)Conference paper, Published paper (Refereed)
National Category
Engineering and Technology
Identifiers
urn:nbn:se:uu:diva-13321 (URN)
Conference
ACTUATOR 2006, 10th international Conference on New Actuators, 14-16 June 2006, Bremen, Germany
Available from: 2008-01-22 Created: 2008-01-22 Last updated: 2016-06-23Bibliographically approved
Snis, N., Simu, U. & Johansson, S. (2005). A piezoelectric disc-shaped motor using a quasi-static walking mechanism. Journal of Micromechanics and Microengineering, 15, 2230-2234
Open this publication in new window or tab >>A piezoelectric disc-shaped motor using a quasi-static walking mechanism
2005 (English)In: Journal of Micromechanics and Microengineering, Vol. 15, p. 2230-2234Article in journal (Refereed) Published
Identifiers
urn:nbn:se:uu:diva-77342 (URN)
Available from: 2006-03-14 Created: 2006-03-14 Last updated: 2011-01-11
Brufau, J., Puig-Vidal, M., Lopez-Sanchez, J., Snis, N., Simu, U., Johansson, S., . . . Velten, T. (2005). MICRON: Small Autonomous Robot for Cell Manipulation Applications. In: 2005 IEEE International Conference on Robotics and Automation, Barcelona, Spain April 2005.
Open this publication in new window or tab >>MICRON: Small Autonomous Robot for Cell Manipulation Applications
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2005 (English)In: 2005 IEEE International Conference on Robotics and Automation, Barcelona, Spain April 2005, 2005Conference paper, Published paper (Refereed)
Identifiers
urn:nbn:se:uu:diva-77524 (URN)
Available from: 2006-03-15 Created: 2006-03-15
Snis, N., Simu, U. & Johansson, S. (2004). Piezoelectric Drive Platform for cm3-sized Autonomous Robot. In: ACTUATOR, Bremen, Germany.
Open this publication in new window or tab >>Piezoelectric Drive Platform for cm3-sized Autonomous Robot
2004 (English)In: ACTUATOR, Bremen, Germany, 2004Conference paper, Published paper (Refereed)
Identifiers
urn:nbn:se:uu:diva-69899 (URN)
Available from: 2005-04-12 Created: 2005-04-12
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