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Publications (10 of 16) Show all publications
Werr, G., Khaji, Z., Ohlin, M., Andersson, M., Klintberg, L., Searle, S., . . . Tenje, M. (2019). Integrated thin film resistive sensors for in situ temperature measurements in an acoustic trap. Journal of Micromechanics and Microengineering, 29(9), Article ID 095003.
Open this publication in new window or tab >>Integrated thin film resistive sensors for in situ temperature measurements in an acoustic trap
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2019 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 29, no 9, article id 095003Article in journal (Refereed) Published
Abstract [en]

This work presents an acoustic trap with integrated thin film sensors to monitor temperature variations during operation. The acoustic trap is wet-etched in glass with a thermally bonded glass lid and the thin-film sensors are integrated during fabrication. We evaluated the performance of the integrated temperature sensors and measured a temperature sensitivity of +/- 0.01 degrees C and confirmed that the read-out of the thin film sensors was not affected neither by the ionic conductivity of the solution nor the addition of microparticles into the acoustic trap. From the experiments we observed a temperature increase of the acoustic trap during operation as a result of the dissipative heating of the the piezoelectric element used to actuate the trap. We also showed that when external convective cooling was applied to the system, the temperature increase of the acoustic trap was higher than the temperature increase of the piezoelectric element itself. This shows the importance of using integrated temperature sensors in acoustic trapping to monitor the local environmental conditions.

Place, publisher, year, edition, pages
IOP PUBLISHING LTD, 2019
Keywords
acoustophoresis, integrated RTD, external TC, acoustic trap, glass chip
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:uu:diva-391278 (URN)10.1088/1361-6439/ab2ac8 (DOI)000476561400001 ()
Funder
Knut and Alice Wallenberg Foundation
Available from: 2019-08-22 Created: 2019-08-22 Last updated: 2019-08-22Bibliographically approved
Werr, G., Khaji, Z., Ohlin, M., Andersson, M., Klintberg, L., Searle, S., . . . Tenje, M. (2019). Integrated thin film resistive sensors for in situ temperature measurements in an acoustic trap. In: Acoustofluidics 2019: This annual meeting will be held in Twente, The Netherlands in 2019. This focused meeting is dedicated to exploring the science, engineering, and use of micro- to nanoscale acoustofluidics.. Paper presented at Acoustofluidics 2019, 25-28 August 2019, Enschede, Netherlands (pp. 140-141).
Open this publication in new window or tab >>Integrated thin film resistive sensors for in situ temperature measurements in an acoustic trap
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2019 (English)In: Acoustofluidics 2019: This annual meeting will be held in Twente, The Netherlands in 2019. This focused meeting is dedicated to exploring the science, engineering, and use of micro- to nanoscale acoustofluidics., 2019, p. 140-141Conference paper, Poster (with or without abstract) (Other academic)
Abstract [en]

This work presents an acoustic trap with integrated thin film sensors to monitor temperature variations during operation. The acoustic trap is wet-etched in glass with a thermally bonded glass lid and the thin-film sensors are integrated during fabrication. We evaluated the performance of the integrated temperature sensors and measured a temperature sensitivity of ±0.01 °C and confirmed that the read-out of the thin film sensors was not affected neither by the ionic conducitiviy of the solution nor the addition of microparticles into the acoustic trap. From the experiments we observed a temperature increase of the acoustic trap during operation as a result of the dissipative heating of the the piezoelectric element used to actuate the trap. We also showed that when external convective cooling was applied to the system, the temperature increase of the acoustic trap was higher than the temperature incresase of the piezoelectric element itself. This shows the importance of using integrated temperature sensors in acoustic trapping to monitor the environmental conditions.

Keywords
acoustophoresis, platinum RTD, external TC, integrated temperature sensor, thin film resistive sensor, acoustic trapping
National Category
Medical Laboratory and Measurements Technologies
Identifiers
urn:nbn:se:uu:diva-398685 (URN)
Conference
Acoustofluidics 2019, 25-28 August 2019, Enschede, Netherlands
Funder
Knut and Alice Wallenberg Foundation
Available from: 2019-12-09 Created: 2019-12-09 Last updated: 2019-12-09Bibliographically approved
Sturesson, P., Khaji, Z., Klintberg, L. & Thornell, G. (2017). Ceramic Pressure Sensor for High Temperatures – Investigation of the Effect of Metallizationon on Read Range. IEEE Sensors Journal, 17(8), 2411-2421
Open this publication in new window or tab >>Ceramic Pressure Sensor for High Temperatures – Investigation of the Effect of Metallizationon on Read Range
2017 (English)In: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 17, no 8, p. 2411-2421Article in journal (Refereed) Published
Abstract [en]

A study on the relationship between circuit metallization, made by double-layer screen printing of platinum and electroplating of silver on top of platinum, and its impact on practical read range of ceramic LC resonators for high-temperature pressure measurements is presented. Also included is the first realization of membranes by draping a graphite insert with ceramic green body sheets. As a quality factor circuit reference, two-port microstrip meander devices were positively evaluated and to study interdiffusion between silver and platinum, test samples were annealed at 500 degrees C, 700 degrees C, and 900 degrees C for 4, 36, 72, and 96 h. The LC resonators were fabricated with both metallization methods, and the practical read range at room temperature was evaluated. Pressure-sensitive membranes were characterized for pressures up to 2.5 bar at room temperature, 500 degrees C and up to 900 degrees C. Samples electroplated with silver exhibited performance equal to or better than double-layer platinum samples for up to 60 h at 500 degrees C, 20 h at 700 degrees C, and for 1 h at 900 degrees C, which was correlated with the degree of interdiffusion as determined from cross-sectional analysis. The LC resonator samples with double-layer platinum exhibited a read range of 61 mm, and the samples with platinum and silver exhibited a read range of 59 mm. The lowest sheet resistance, and, thereby, the highest read range of 86 mm, was obtained with a silver electroplated LC resonator sample after 36 h of annealing at 500 degrees C.

Keywords
Alternative metallization, ceramic membrane, harsh environment sensor, high temperature co-fired ceramics (HTCC), HTCC processing, LC resonator, pressure sensor, wireless reading
National Category
Accelerator Physics and Instrumentation Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-302852 (URN)10.1109/JSEN.2017.2671418 (DOI)000398890800016 ()
Available from: 2016-09-11 Created: 2016-09-11 Last updated: 2018-08-03Bibliographically approved
Khaji, Z., Klintberg, L., Barbade, D., Palmer, K. & Thornell, G. (2017). Endurance and Failure of an Alumina-based Monopropellant Microthruster with Integrated Heater, Catalytic Bed and Temperature Sensors. Journal of Micromechanics and Microengineering, 27(5), 1-11, Article ID 055011.
Open this publication in new window or tab >>Endurance and Failure of an Alumina-based Monopropellant Microthruster with Integrated Heater, Catalytic Bed and Temperature Sensors
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2017 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 27, no 5, p. 1-11, article id 055011Article in journal (Refereed) Published
Abstract [en]

Monopropellant ceramic microthrusters with an integrated heater, catalytic bed and two temperature sensors, but of various designs, were manufactured by milling a fluidic channel and chamber, and a nozzle, and screen printing platinum patterns on green tapes of alumina that were stacked and laminated before sintering. In order to increase the surface area of the catalytic bed, the platinum paste was mixed with a sacrificial paste that disappeared during sintering, to leave behind a porous and rough layer. As an early development level in manufacturing robust and high-temperature tolerant microthrusters, the influence of design on the temperature gradients and dry temperature tolerance of the devices was studied. On average, the small reaction chambers showed a more than 1.5 times higher dry temperature tolerance (in centigrade) compared to devices with larger chambers, independent of the heater and device size. However, for a given temperature, big devices consumed on average 2.9 times more power than the small ones. It was also found that over the same area and under the same heating conditions, devices with small chambers were subjected to approximately 40% smaller temperature differences. A pressure test done on two small devices with small chambers revealed that pressures of at least 26.3 bar could be tolerated. Above this pressure, the interfaces failed but the devices were not damaged. To investigate the cooling effect of the micropropellant, the endurance of a full thruster was also studied under wet testing where it was fed with 31 wt.% hydrogen peroxide. The thruster demonstrated complete evaporation and/or full decomposition at a power above 3.7 W for a propellant flow of 50 mu l min(-1). At this power, the catalytic bed locally reached a temperature of 147 degrees C. The component was successfully heated to an operating temperature of 307 degrees C, where it cracked. Under these firing conditions, and assuming complete decomposition, calculations give a thrust and specific impulse of 0.96 mN and 106 s, respectively. In the case of evaporation, the corresponding values are calculated to be 0.84 mN and 92 s.

Keywords
HTCC, hydrogen peroxide, platinum, heater, catalytic bed, temperature sensor, monopropellant microthruster
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-302849 (URN)10.1088/1361-6439/aa6550 (DOI)000398327700003 ()
Funder
Swedish National Space BoardKnut and Alice Wallenberg Foundation
Available from: 2016-09-11 Created: 2016-09-11 Last updated: 2017-05-11Bibliographically approved
Persson, A., Khaji, Z. & Klintberg, L. (2016). Dynamic Behaviour and Conditioning Time of a Zirconia Flow Sensor for High-Temperature Applications. Sensors and Actuators A-Physical, 251, 59-65
Open this publication in new window or tab >>Dynamic Behaviour and Conditioning Time of a Zirconia Flow Sensor for High-Temperature Applications
2016 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 251, p. 59-65Article in journal (Refereed) Published
Abstract [en]

The temperature dependent ion conductivity of yttria stabilized zirconia (YSZ) can be used to create a miniaturized flow sensor using a calorimetric measurement scheme. Such a sensor is compatible with harsh environments, and can sustain temperatures of up to 1000 degrees C, although thermal crosstalk will limit its performance as the temperature rises. This paper investigates if the integration of thermal isolation in the form of sealed cavities can mitigate the detrimental effect of the thermal crosstalk, particularly by studying the conditioning time of the sensor to temperature changes. To this end, high temperature co-fired ceramic (HTCC) sensors were fabricated from tapes of 8 mol-% YSZ that were screen printed with platinum paste. Definition of channels and structures were made by milling the green tapes, and sacrificial inserts were placed in all cavities to give mechanical support during lamination and sintering. Cavities with widths of 240 mu m, 400 mu m and 560 mu m were investigated, and sensors without cavities were also made to serve as references. Additionally, two different positions of the sensor element with respect to the edge of the cavity (560 or 800 mu m) were investigated. The results showed that it was possible to improve the conditioning time of the sensor by up to five times by the use of isolating cavities, and that this improvement is translated into a reduction in rate-dependent hysteresis for measurements with long elapse times. The latter effect is most pronounced for the sensors with the largest cavities.

Keywords
Calorimetric flow sensor, Yttria stabilized zirconia, Ion conduction, Harsh environments
National Category
Physical Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-302856 (URN)10.1016/j.sna.2016.10.002 (DOI)000388783800008 ()
Funder
Knut and Alice Wallenberg Foundation
Available from: 2016-09-11 Created: 2016-09-11 Last updated: 2017-11-21Bibliographically approved
Khaji, Z., Klintberg, L. & Thornell, G. (2016). Manufacturing and characterization of a ceramic single-use microvalve. Journal of Micromechanics and Microengineering, 26(9), Article ID 095002.
Open this publication in new window or tab >>Manufacturing and characterization of a ceramic single-use microvalve
2016 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 26, no 9, article id 095002Article in journal (Refereed) Published
Abstract [en]

We present the manufacturing and characterization of a ceramic single-use microvalve withthe potential to be integrated in lab-on-a-chip devices, and forsee its utilization in space andother demanding applications. A 3 mm diameter membrane was used as the flow barrier, andthe opening mechanism was based on cracking the membrane by inducing thermal stresses onit with fast and localized resistive heating.

Four manufacturing schemes based on high-temperature co-fired ceramic technology werestudied. Three designs for the integrated heaters and two thicknesses of 40 and 120 μmfor the membranes were considered, and the heat distribution over their membranes, therequired heating energies, their opening mode, and the flows admitted through were compared.Furthermore, the effect of applying +1 and −1 bar pressure difference on the membraneduring cracking was investigated. Thick membranes demonstrated unpromising results forlow-pressure applications since the heating either resulted in microcracks or cracking of thewhole chip. Because of the higher pressure tolerance of the thick membranes, the designwith microcracks can be considered for high-pressure applications where flow is facilitatedanyway. Thin membranes, on the other hand, showed different opening sizes depending onheater design and, consequently, heat distribution over the membranes, from microcracks toholes with sizes of 3–100% of the membrane area. For all the designs, applying +1 bar overpressure contributed to bigger openings, whereas −1 bar pressure difference only did so forone of the designs, resulting in smaller openings for the other two. The energy required forbreaking these membranes was a few hundred mJ with no significant dependence on designand applied pressure. The maximum sustainable pressure of the valve for the current designand thin membranes was 7 bar.

Keywords
single-use valve, HTCC, alumina, platinum
National Category
Engineering and Technology Materials Engineering
Identifiers
urn:nbn:se:uu:diva-298806 (URN)10.1088/0960-1317/26/9/095002 (DOI)000402408400002 ()
Funder
Swedish National Space BoardKnut and Alice Wallenberg Foundation
Available from: 2016-07-08 Created: 2016-07-08 Last updated: 2017-07-11Bibliographically approved
Persson, A., Berglund, M., Khaji, Z., Sturesson, P., Söderberg, J. & Thornell, G. (2016). Optogalvanic spectroscopy with microplasma sources – Current status and development towards lab on a chip. Journal of Micromechanics and Microengineering, 26(10), Article ID 104003.
Open this publication in new window or tab >>Optogalvanic spectroscopy with microplasma sources – Current status and development towards lab on a chip
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2016 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 26, no 10, article id 104003Article in journal (Refereed) Published
Abstract [en]

Miniaturized optogalvanic spectroscopy (OGS) shows excellent prospects of becoming ahighly sensitive method for gas analysis in micro total analysis systems. Here, a status reporton the current development of microwave induced microplasma sources for OGS is presented,together with the first comparison of the sensitivity of the method to conventional single-passabsorption spectroscopy. The studied microplasma sources are stripline split-ring resonators(SSRRs), with typical ring radii between 3.5 and 6 mm and operation frequencies around2.6 GHz. A linear response (R2 = 0.9999), and a stability of more than 100 s are demonstratedwhen using the microplasma source as an optogalvanic detector. Additionally, saturationeffects at laser powers higher than 100 mW are observed, and the temporal response of theplasma to periodic laser perturbation with repletion rates between 20 Hz and 200 Hz arestudied. Finally, the potential of integrating additional functionality with the detector isdiscussed, with the particular focus on a pressure sensor and a miniaturized combustor toallow for studies of solid samples.

Keywords
Optogalvanic spectroscopy, split-ring resonator, microplasma sources
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Atom and Molecular Physics and Optics
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-284627 (URN)10.1088/0960-1317/26/10/104003 (DOI)000384028900003 ()
Funder
Swedish National Space Board, 104/14
Note

Awaiting publication online. 

Available from: 2016-04-19 Created: 2016-04-19 Last updated: 2017-11-30Bibliographically approved
Khaji, Z., Sturesson, P., Klintberg, L., Hjort, K. & Thornell, G. (2015). Manufacturing and characterization of a ceramic microcombustor with integrated oxygen storage and release element. Journal of Micromechanics and Microengineering, 25(10), Article ID 104006.
Open this publication in new window or tab >>Manufacturing and characterization of a ceramic microcombustor with integrated oxygen storage and release element
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2015 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, no 10, article id 104006Article in journal (Refereed) Published
Abstract [en]

A microscale ceramic high-temperature combustor with a built-in temperature sensor and source of oxygen has been designed, manufactured and characterized. The successful in situ electroplating and oxidation of copper, and the use of copper oxide as the source of oxygen were demonstrated. It was shown that residual stresses from electroplating, copper oxidation and oxide decomposition did not cause much deformation of the substrate but influenced mainly the integrity and adhesion of the metal films. The process had influence on the electrical resistances, however. Calibration of the temperature sensor and correlation with IR thermography up to 1000°C revealed a nearly linear sensor behavior. Demonstration of combustion in a vacuum chamber proved that no combustion had occurred before release of oxygen from the metal oxide resource.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2015
Keywords
isotopic analysis, HTCC, combustor, EDS, TGA, RGA, oxygen release
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-264147 (URN)10.1088/0960-1317/25/10/104006 (DOI)000366827400007 ()
Funder
Swedish National Space Board
Available from: 2015-10-06 Created: 2015-10-06 Last updated: 2018-08-03Bibliographically approved
Persson, A., Berglund, M., Khaji, Z., Sturesson, P., Söderberg, J. & Thornell, G. (2015). Optogalvanic spectroscopy with microplasma sources – Current status and development towards Lab-On-A-Chip. In: : . Paper presented at MME 2015, 26th Micromechnics and Microsystems Europe Workshop, Toledo, Spain, Sept 20-23.. Toledo, Spain
Open this publication in new window or tab >>Optogalvanic spectroscopy with microplasma sources – Current status and development towards Lab-On-A-Chip
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2015 (English)Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

Miniaturized optogalvanic spectros-copy shows excellent prospects of becoming a highly sensitive method for gas analysis in micro total analysis systems. Here, a status report on the current development of microplasma sources for optogalvan-ic spectroscopy is presented, together with the first comparison of the sensitivity of the method to con-ventional single-pass absorption spectroscopy. The stability and reproducibility of the microplasma source when used as a detector for optogalvanic spectroscopy is also investigated, and a roadmap of future developments is presented, with the particular focus of integrating sensors for measuring the pres-sure, temperature and flow of the sample gas through the detector, and combining the detector with a miniaturized combustor to allow for studies of solid samples.

Place, publisher, year, edition, pages
Toledo, Spain: , 2015
Keywords
Optogalvanic spectroscopy, Micro-plasma sources, Split-ring resonator
National Category
Aerospace Engineering
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-264105 (URN)
Conference
MME 2015, 26th Micromechnics and Microsystems Europe Workshop, Toledo, Spain, Sept 20-23.
Funder
Swedish National Space Board, 104/14
Available from: 2015-10-05 Created: 2015-10-05 Last updated: 2016-02-09Bibliographically approved
Sturesson, P., Khaji, Z., Knaust, S., Klintberg, L. & Thornell, G. (2015). Thermomechanical properties and performance of ceramic resonators for wireless pressure reading in high temperatures. Journal of Micromechanics and Microengineering, 25(9), Article ID 095016.
Open this publication in new window or tab >>Thermomechanical properties and performance of ceramic resonators for wireless pressure reading in high temperatures
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2015 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, no 9, article id 095016Article in journal (Refereed) Published
Abstract [en]

This paper reports on the design, fabrication and thermomechanical study of ceramic LC resonators for wireless pressure reading, verified at room temperature, at 500 °C and at 1000 °C for pressures up to 2.5 bar. Five different devices were fabricated of high-temperature co-fired ceramics (HTCC) and characterized. Alumina green tape sheets were screen printed with platinum paste, micromachined, laminated and fired. The resulting samples were 21 x 19 mm2 with different thicknesses. An embedded communicator part was integrated with either a passive backing part or with a pressure-sensing element, including an 80 μm thick and 6 mm diameter diaphragm. The study includes measuring thermally and mechanically induced resonance frequency shifts, and thermally induced deformations. For the pressure sensor device, contributions from changes in the relative permittivity and from expanding air, trapped in the cavity, were extracted. The devices exhibited thermomechanical robustness during heating, regardless of the thickness of the backing. The pressure sensitivity decreased with increasing temperature from 15 050 ppm/bar at room temperature to 2400 ppm/bar at 1000°C, due to the decreasing pressure difference between the external pressure and the air pressure inside the cavity. 

Keywords
Wireless Reading, HTCC, Pressure sensing, Harsh Environments, Thermomechanical properties
National Category
Engineering and Technology
Identifiers
urn:nbn:se:uu:diva-253555 (URN)10.1088/0960-1317/25/9/095016 (DOI)000365167700023 ()
Funder
Knut and Alice Wallenberg Foundation
Available from: 2015-05-29 Created: 2015-05-29 Last updated: 2018-08-03Bibliographically approved
Organisations
Identifiers
ORCID iD: ORCID iD iconorcid.org/0000-0002-5452-7831

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