Logo: to the web site of Uppsala University
uu.se
Publications from Uppsala University
Please wait ...
Simple search
Advanced search -
Research publications
Advanced search -
Student theses
Statistics
English
Svenska
Norsk
Jump to content
Change search
Search
Search
Only documents with full text in DiVA
Cite
Export
BibTex
CSL-JSON
CSV 1
CSV 2
CSV 3
CSV 4
CSV 5
CSV all metadata
CSV all metadata version 2
RIS
Mods
MARC-XML
ETDMS
Link to record
Permanent link
https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-257977
Direct link
http://uu.diva-portal.org/smash/record.jsf?pid=diva2:840935
Cite
Citation style
apa
ieee
modern-language-association
vancouver
Other style
apa
ieee
modern-language-association
vancouver
Other style
More styles
Language
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
More languages
Output format
html
text
asciidoc
rtf
html
text
asciidoc
rtf
Create
Close
Electrical defects in silicon introduced by sputtering and sputter-etching
Grusell, E
Berg, Sören
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Andersson, LP
1980 (English)
In:
Journal of the Electrochemical Society, ISSN 0013-4651, E-ISSN 1945-7111, Vol. 127, no 7, p. 1573-
Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1980. Vol. 127, no 7, p. 1573-
National Category
Engineering and Technology
Identifiers
URN:
urn:nbn:se:uu:diva-257977
OAI: oai:DiVA.org:uu-257977
DiVA, id:
diva2:840935
Available from:
2015-07-09
Created:
2015-07-09
Last updated:
2017-12-04
Open Access in DiVA
No full text in DiVA
By organisation
Solid State Electronics
In the same journal
Journal of the Electrochemical Society
On the subject
Engineering and Technology
Search outside of DiVA
Google
Google Scholar
urn-nbn
Altmetric score
urn-nbn
Total: 746 hits
Cite
Export
BibTex
CSL-JSON
CSV 1
CSV 2
CSV 3
CSV 4
CSV 5
CSV all metadata
CSV all metadata version 2
RIS
Mods
MARC-XML
ETDMS
Link to record
Permanent link
https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-257977
Direct link
http://uu.diva-portal.org/smash/record.jsf?pid=diva2:840935
Cite
Citation style
apa
ieee
modern-language-association
vancouver
Other style
apa
ieee
modern-language-association
vancouver
Other style
More styles
Language
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
More languages
Output format
html
text
asciidoc
rtf
html
text
asciidoc
rtf
Create
Close
v. 2.41.0
|
WCAG
|
Uppsala University Library
|
Ask the Library
|
Log in to DiVA
|
Search and link in DiVA
DiVA
Logotyp