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Microdispenser with continuous flow and selectable target volume for microfluidic high-pressure applications
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
2014 (Engelska)Ingår i: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 23, nr 2, s. 452-458Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

This paper presents a reusable microdispenser intended for continuous flow dispensing of variable and controlled volumes of liquid against high back-pressures. The microdispenser consists of two active valves and a dispenser chamber, all actuated by the volume change associated with the solid-to-liquid phase transition of paraffin wax. It is fabricated using stainless steel sheets, a flexible printed circuit board, and a polyimide membrane. All are covered with Parylene C for insulation and fusion bonding at assembly. A finite element method (FEM) model of the paraffin actuator is used to predict the resulting flow characteristics. The results show dispensing of well-defined volumes of 350 and 540 nL, with a good repeatability between dispensing sequences, as well as reproducibility between devices. In addition, the flow characteristics show no back-pressure dependence of the dispensed flow in the interval 0.5--2.0 MPa. The FEM model can be used to predict the flow characteristics qualitatively

Ort, förlag, år, upplaga, sidor
2014. Vol. 23, nr 2, s. 452-458
Nyckelord [en]
High pressure, liquid chromatography, MEMS, microdispenser, micropump, phase change material
Nationell ämneskategori
Teknik och teknologier
Forskningsämne
Teknisk fysik med inriktning mot mikrosystemteknik
Identifikatorer
URN: urn:nbn:se:uu:diva-208855DOI: 10.1109/JMEMS.2013.2279976ISI: 000334526200022OAI: oai:DiVA.org:uu-208855DiVA, id: diva2:654896
Forskningsfinansiär
VetenskapsrådetVINNOVA, 29461-1ÅForsk (Ångpanneföreningens Forskningsstiftelse)Tillgänglig från: 2013-10-09 Skapad: 2013-10-09 Senast uppdaterad: 2017-12-06Bibliografiskt granskad
Ingår i avhandling
1. High-Pressure Microfluidics
Öppna denna publikation i ny flik eller fönster >>High-Pressure Microfluidics
2013 (Engelska)Doktorsavhandling, sammanläggning (Övrigt vetenskapligt)
Abstract [en]

In this thesis, some fundamentals and possible applications of high-pressure microfluidics have been explored. Furthermore, handling fluids at high pressures has been addressed, specifically by creating and characterizing strong microvalves and pumps.

A variety of microstructuring techniques was used to realize these microfluidic devices, e.g., etching, lithography, and bonding. To be able to handle high pressures, the valves and pumps need to be strong. This necessitates a strong actuator material. In this thesis, the material of choice is paraffin wax.

A new way of latching paraffin-actuated microvalves into either closed or open position has been developed, using the low thermal conductivity of paraffin to create large thermal gradients within a microactuator. This allows for long open and closed times without power consumption.

In addition, three types of paraffin-actuated pumps are presented: A peristaltic high-pressure pump with integrated temperature control, a microdispensing pump with high repeatability, and a pump system with two pumps working with an offset to reduce flow irregularities. Furthermore, the fundamental behavior of paraffin as a microactuator material has been explored by finite element modeling.

One possibility that arises with high-pressure microfluidics, is the utilization of supercritical fluids for different applications. The unique combination of material properties found in supercritical fluids yields them interesting applications in, e.g., extraction and cleaning. In an attempt to understand the microfluidic behavior of supercritical carbon dioxide, the two-phase flow, with liquid water as the second phase, in a microchannel has been studied and mapped with respect to both flow regime and droplet behavior at a bi-furcating outlet.

Ort, förlag, år, upplaga, sidor
Uppsala: Acta Universitatis Upsaliensis, 2013. s. 53
Serie
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1085
Nyckelord
phase change, actuator, valve, pump, supercritical fluid
Nationell ämneskategori
Teknik och teknologier
Forskningsämne
Teknisk fysik med inriktning mot mikrosystemteknik
Identifikatorer
urn:nbn:se:uu:diva-208915 (URN)978-91-554-8773-7 (ISBN)
Disputation
2013-11-29, Polhemsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, 751 21, Uppsala, 09:30 (Engelska)
Opponent
Handledare
Forskningsfinansiär
Vetenskapsrådet
Tillgänglig från: 2013-11-07 Skapad: 2013-10-10 Senast uppdaterad: 2014-01-23

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