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Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples – key components and a first integration attempt
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).ORCID iD: 0000-0003-0832-1848
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).ORCID iD: 0000-0002-5452-7831
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.ORCID iD: 0000-0001-7715-3142
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
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2016 (English)In: 27th Micromechanics And Microsystems Europe Workshop (MME 2016) / [ed] IOP, Institute of Physics (IOP), 2016, Vol. 757, article id 012029Conference paper, Published paper (Refereed)
Abstract [en]

This is a short summary of the authors’ recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2016. Vol. 757, article id 012029
Series
Journal of Physics: Conference Series, ISSN 1742-6588, E-ISSN 1742-6596 ; 757
National Category
Materials Engineering Other Engineering and Technologies
Research subject
Engineering Science with specialization in Advanced Instrumentation and Measurements
Identifiers
URN: urn:nbn:se:uu:diva-309931DOI: 10.1088/1742-6596/757/1/012029ISI: 000439687000029OAI: oai:DiVA.org:uu-309931DiVA, id: diva2:1053091
Conference
27th Micromechanics and Microsystems Europe (MME) Workshop, Aug 28-30, 2016, Cork, Ireland
Funder
Swedish National Space BoardKnut and Alice Wallenberg FoundationAvailable from: 2016-12-08 Created: 2016-12-08 Last updated: 2020-01-08Bibliographically approved

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Berglund, MartinKhaji, ZahraKlintberg, LenaPersson, AndersSturesson, PeterThornell, Greger

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