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Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples – key components and a first integration attempt
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
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2016 (English)In: Journal of Physics: Conference Series, Institute of Physics (IOP), 2016Conference paper, Published paper (Refereed)
Abstract [en]

This is a short summary of the authors’ recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2016.
Series
Journal of Physics: Conference Series ; 757
National Category
Materials Engineering Other Engineering and Technologies
Research subject
Engineering Science with specialization in Advanced Instrumentation and Measurements
Identifiers
URN: urn:nbn:se:uu:diva-309931DOI: 10.1088/1742-6596/757/1/012029OAI: oai:DiVA.org:uu-309931DiVA, id: diva2:1053091
Conference
27th Micromechanics and Microsystems Europe Workshop
Available from: 2016-12-08 Created: 2016-12-08 Last updated: 2016-12-08

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Publisher's full texthttp://iopscience.iop.org/article/10.1088/1742-6596/757/1/012029/pdf
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Ångström Space Technology Centre (ÅSTC)Microsystems Technology
Materials EngineeringOther Engineering and Technologies

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