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Fabrication of Suspended All-Metal Sensor Elements in Ceramic Laminates
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC). Försvarshögskolan/Swedish National Defence College.ORCID iD: 0000-0002-0501-0887
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).ORCID iD: 0000-0003-0832-1848
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
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2016 (English)In: Proc. of Micronano System Workshop 2016, Lund, Sweden, May 17-18, 2016, 2016Conference paper, Published paper (Other academic)
Abstract [en]

To target a wide range of high-temperature applications [1-4], the Ångström Space Technology Centre has added High-Temperature Co-fired Ceramics, HTTC, technology to its repertoire. Usually, this technology follows a processing scheme where thin sheets of green-body ceramics are metallized through screen printing and structured by embossing, punching or milling, before they are laminated and sintered to form components. A limitation with this, is the difficulty of realizing freely suspended metal structures, which is a disadvantage in, e.g., the fabrication of calorimetric sensors or electric field probes. In this work, the embedding of platinum wires in HTCC is explored experimentally, and demonstrated for use in pressure and plasma I-V sensing.

Place, publisher, year, edition, pages
2016.
Keywords [en]
Microsensors, Bond WIre, Harsh Environments, High Temperatures, Ceramic Systems
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microwave Technology
Identifiers
URN: urn:nbn:se:uu:diva-309945OAI: oai:DiVA.org:uu-309945DiVA, id: diva2:1053128
Conference
Micronano System Workshop (MSW2016) Lund, Sweden, May 17-18, 2016
Available from: 2016-12-08 Created: 2016-12-08 Last updated: 2017-05-16

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Sturesson, PeterBerglund, MartinKlintberg, LenaPersson, AndersThornell, Greger

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