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Deposition using the Magnetized Hollow Cathode Activated Magnetron
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity.
2018 (English)Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
2018. p. G5-7
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Meteorology and Atmospheric Sciences
Identifiers
URN: urn:nbn:se:uu:diva-369709OAI: oai:DiVA.org:uu-369709DiVA, id: diva2:1271175
Conference
45th International Conference on metallurgical coatings and thin films, april 23-27, 2018, San Diego, USA
Available from: 2018-12-17 Created: 2018-12-17 Last updated: 2019-03-06Bibliographically approved

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Barankova, HanaBardos, Ladislav

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CiteExportLink to record
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