uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Influence of Humidity on Contact Resistance in Graphene Devices
KTH Royal Inst Technol, Sch Elect Engn & Comp Sci, Dept Micro & Nanosyst, SE-10044 Stockholm, Sweden.
KTH Royal Inst Technol, Sch Elect Engn & Comp Sci, Dept Elect, Electrum 229, SE-16440 Kista, Sweden;Chalmers Univ Technol, Dept Microtechnol & Nanosci, S-41296 Gothenburg, Sweden.
KTH Royal Inst Technol, Swedish E Sci Res Ctr SeRC, SE-10044 Stockholm, Sweden;KTH Royal Inst Technol, Sch Sci & Engn, Dept Appl Phys, Electrum 229, SE-16440 Kista, Sweden.ORCID iD: 0000-0002-8222-3157
KTH Royal Inst Technol, Sch Elect Engn & Comp Sci, Dept Micro & Nanosyst, SE-10044 Stockholm, Sweden.
Show others and affiliations
2018 (English)In: ACS Applied Materials and Interfaces, ISSN 1944-8244, E-ISSN 1944-8252, Vol. 10, no 48, p. 41738-41746Article in journal (Refereed) Published
Abstract [en]

The electrical contact resistance at metal-graphene interfaces can significantly degrade the properties of graphene devices and is currently hindering the full exploitation of graphene's potential. Therefore, the influence of environmental factors, such as humidity, on the metal-graphene contact resistance is of interest for all graphene devices that operate without hermetic packaging. We experimentally studied the influence of humidity on bottom-contacted chemical-vapor-deposited (CVD) graphene-gold contacts, by extracting the contact resistance from transmission line model (TLM) test structures. Our results indicate that the contact resistance is not significantly affected by changes in relative humidity (RH). This behavior is in contrast to the measured humidity sensitivity (0.059 +/- 0.011 %/% RH) of graphene's sheet resistance. In addition, we employ density functional theory (DFT) simulations to support our experimental observations. Our DFT simulation results demonstrate that the electronic structure of the graphene sheet on top of silica is much more sensitive to adsorbed water molecules than the charge density at the interface between gold and graphene. Thus, we predict no degradation of device performance by alterations in contact resistance when such contacts are exposed to humidity. This knowledge underlines that bottom-contacting of graphene is a viable approach for a variety of graphene devices and the back end of the line integration on top of conventional integrated circuits.

Place, publisher, year, edition, pages
AMER CHEMICAL SOC , 2018. Vol. 10, no 48, p. 41738-41746
Keywords [en]
graphene, contact resistance, sheet resistance, humidity sensitivity, bottom-contact, integration
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-373001DOI: 10.1021/acsami.8b10033ISI: 000452694100088PubMedID: 30387599OAI: oai:DiVA.org:uu-373001DiVA, id: diva2:1278274
Funder
EU, European Research Council, 277879EU, European Research Council, 307311VINNOVA, 2016-01655VINNOVA, 2017-05108Swedish Research Council, 2015-05112Swedish Research Council, VR 2015-04608Swedish Research Council, VR 2016-05980Swedish Energy Agency, STEM P40147-1Available from: 2019-01-14 Created: 2019-01-14 Last updated: 2019-01-14Bibliographically approved

Open Access in DiVA

fulltext(4455 kB)66 downloads
File information
File name FULLTEXT01.pdfFile size 4455 kBChecksum SHA-512
5587c115e4e01f392768dd621a4d2d1dd7428187b21b5a2684abd42d83d349d5ceb7179357a49cee62e067e54571fbdf863dc56b3cb7c08118e1e7112e8956e6
Type fulltextMimetype application/pdf

Other links

Publisher's full textPubMed

Authority records BETA

Delin, Anna

Search in DiVA

By author/editor
Elgammal, KarimDelin, AnnaLemme, Max
By organisation
Materials Theory
In the same journal
ACS Applied Materials and Interfaces
Materials Chemistry

Search outside of DiVA

GoogleGoogle Scholar
Total: 66 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
pubmed
urn-nbn

Altmetric score

doi
pubmed
urn-nbn
Total: 40 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf