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A thermal microactuator made by partial impregnation of polyimide with paraffin
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för materialvetenskap.
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för materialvetenskap.
2002 (engelsk)Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 12, nr 6, s. 849-854Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

We have fabricated and tested thermal, paraffin-impregnated polyimide actuators, utilizing the large volume increase associated with the solid-to-liquid phase transition of paraffin. In the bimorph-like device, the top layer was made porous by ion track technology. Stochastically distributed pores of various lengths (95, 70, 45 and 20 µm) and various lateral coverages (5–45%) were filled with paraffin by liquid substitution or from vacuum, and sealed with epoxy. Actuators, 125 µm thick, 35 mm long and 7 mm wide, have been characterized with respect to tip deflection and load-carrying capacity with one end rigidly clamped. Loaded with 0.6 g or about ten times their own weight at their free end, about 50% of the maximum stroke (17 mm) was still attained.

sted, utgiver, år, opplag, sider
2002. Vol. 12, nr 6, s. 849-854
HSV kategori
Identifikatorer
URN: urn:nbn:se:uu:diva-89914DOI: 10.1088/0960-1317/12/6/316OAI: oai:DiVA.org:uu-89914DiVA, id: diva2:161774
Tilgjengelig fra: 2002-05-16 Laget: 2002-05-16 Sist oppdatert: 2017-12-14bibliografisk kontrollert
Inngår i avhandling
1. Miniature Phase-Transistion Actuators
Åpne denne publikasjonen i ny fane eller vindu >>Miniature Phase-Transistion Actuators
2002 (engelsk)Doktoravhandling, med artikler (Annet vitenskapelig)
Abstract [en]

Clearly, there is a need for simple, strong actuators capable of large strokes in miniaturized systems such as valves and optical shutters.

The basis for this work is the microstructure technology with processing techniques adopted from the integrated circuit industry. In many cases alternative techniques have been developed to obtain features not achievable with conventional silicon technology. Techniques to fabricate thermally activated phase transition actuators capable of large strokes, as well as strong, piezoceramic actuators, have been investigated

Multilayered piezoceramic actuators have been fabricated and used in a miniature linear motor. A technique to build freestanding, three-dimensional structures drop by drop using a micromachined ink jet head and a slurry of piezoceramic particles has been developed. Ion track technology was used to create narrow pores in polyimide. To make bimorph-like structures capable of large strokes, these pores were impregnated with paraffin- a material with a large volume expansion associated with its solid-to-liquid phase transition. Paraffin was used in a silicon thermal switch intended for a passive thermal control system, and in a device to be used as a valve in a gas regulation system. Finally, paraffin actuators for integration in thermoplastic microfluidic systems have been developed.

During the course of this work not only the importance of identifying the best materials for a given application has been addressed and acknowledged, but also that of finding a processing route on occasion far from the conventional one, and perhaps most important, that of anticipating the often surprising effects following from miniaturization.

sted, utgiver, år, opplag, sider
Uppsala: Acta Universitatis Upsaliensis, 2002. s. 28
Serie
Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1104-232X ; 728
Emneord
Materials science, Materialvetenskap
HSV kategori
Forskningsprogram
materialvetenskap
Identifikatorer
urn:nbn:se:uu:diva-2138 (URN)91-554-5345-7 (ISBN)
Disputas
2002-06-06, Ångströmslaboratoriet 2002, Uppsala, 09:30
Opponent
Tilgjengelig fra: 2002-05-16 Laget: 2002-05-16bibliografisk kontrollert

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