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MEMS-based VCSEL beam steering using replicated polymer diffractive lens
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrostrukturteknik.
Vise andre og tillknytning
2008 (engelsk)Inngår i: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 142, nr 1, s. 336-345Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

This paper describes a fully integrated micro-optical system, in which dynamic angular control of the beam from a vertical cavity surface emitting laser (VCSEL) is realized by laterally moving a collimating diffractive lens in the light path. The lens is mounted on a translatable silicon stage, which consists of a frame with an opening for the light to traverse the lens and electro-statically driven comb actuators, by which the lateral movement is achieved. Devices implementing both one-(1D) and two-dimensional (2D) scanning have been fabricated and evaluated. Integration of the lens onto the translatable silicon stage is done using a newly developed fabrication process based on hot embossing of an amorphous fluorocarbon polymer. This fabrication process relies on a reversed-order protocol, where the structuring of the optical element precedes the silicon microstructuring. Assembly and packaging of the VCSEL-MOEMS system, using low temperature cofired ceramic (LTCC) technique, is also demonstrated. Optical evaluation of the system and beam steering function shows significant beam deflection for a relatively low driving voltage (similar to 70 V).

sted, utgiver, år, opplag, sider
2008. Vol. 142, nr 1, s. 336-345
HSV kategori
Identifikatorer
URN: urn:nbn:se:uu:diva-95122DOI: 10.1016/j.sna.2006.12.015ISI: 000253613100050OAI: oai:DiVA.org:uu-95122DiVA, id: diva2:169211
Tilgjengelig fra: 2006-11-22 Laget: 2006-11-22 Sist oppdatert: 2017-12-14bibliografisk kontrollert
Inngår i avhandling
1. Single-Molecule Detection and Optical Scanning in Miniaturized Formats
Åpne denne publikasjonen i ny fane eller vindu >>Single-Molecule Detection and Optical Scanning in Miniaturized Formats
2006 (engelsk)Doktoravhandling, med artikler (Annet vitenskapelig)
Abstract [en]

In later years polymer replication techniques have become a frequently employed fabrication method for microfluidic and micro-optical devices. This thesis describes applications and further developments of microstructures replicated in polymer materials.

A novel method for homogenous amplified single-molecule detection utilizing a microfluidic readout format is presented. The method enables enumeration of single biomolecules by transforming specific molecular recognition events at nanometer dimensions to micrometer-sized DNA macromolecules. This transformation process is mediated by target specific padlock probe ligation, followed by rolling circle amplification (RCA) resulting in the creation of one rolling circle product (RCP) for each recognized target. Throughout this transformation the discrete nature of the molecular population is preserved. By hybridizing a fluorescence-labeled DNA detection oligonucleotide to each repeated sequence of the RCP, a confined cluster of fluorophores is generated, which makes optical detection and quantification possible. Spectral multiplexing is also possible since the spectral profile of each RCP can be analyzed separately. The microfluidic data acquisition process is characterized in detail and conditions that allow for quantification limited only by Poisson sampling statistics is established. The molecular characteristics of RCPs in solution are also investigated.

Furthermore a novel thermoplastic microfluidic platform is described. The platform allows for observation of the microchannels using high magnification optics and also offers the possibility of on-chip cell culture and the integration of mechanical actuators.

A novel fabrication process for the integration of polymer micro-optical elements on silicon is presented. The process is used for fabrication of a micro-optical system consisting of a laser and a movable microlens making beam steering possible. Such a micro-scanning system could potentially be used for miniaturized biochemical analysis.

sted, utgiver, år, opplag, sider
Uppsala: Acta Universitatis Upsaliensis, 2006. s. 61
Serie
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 240
Emneord
Biotechnology, microfluidics, single-molecule detection, MOEMS, μTAS, lab-on-a-chip, RCA, thermoplastics, injection molding, hot embossing, Bioteknik
Identifikatorer
urn:nbn:se:uu:diva-7268 (URN)91-554-6715-6 (ISBN)
Disputas
2006-12-14, Siegbahnsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 13:15
Opponent
Veileder
Tilgjengelig fra: 2006-11-22 Laget: 2006-11-22bibliografisk kontrollert

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