Micro sculpturing - Somewhat new materials and micromachining methods to meet new applications
1999 (English)In: Eurosensors -99, 1999Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
1999.
Identifiers
URN: urn:nbn:se:uu:diva-46350OAI: oai:DiVA.org:uu-46350DiVA, id: diva2:74257
2007-02-092007-02-092013-03-08