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Nitrogen 1s electron binding energy assignment in carbon nitride thin films with different structures
Uppsala University.
Uppsala University.
Uppsala University.
Uppsala University.
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1997 (English)In: JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, ISSN 0368-2048, Vol. 87, no 1, 45-49 p.Article in journal (Other scientific) Published
Abstract [en]

Carbon nitride thin films deposited by dc unbalanced magnetron sputtering have been analyzed by high-resolution X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The XPS data show that N 1s binding stares depend on substrate temperature (T-s)

Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV , 1997. Vol. 87, no 1, 45-49 p.
Keyword [en]
carbon nitride film; XPS; Raman spectrum; N 1s binding energy; AMORPHOUS-CARBON; PHYSICAL-PROPERTIES; CNX; DEPOSITION
Identifiers
URN: urn:nbn:se:uu:diva-72097OAI: oai:DiVA.org:uu-72097DiVA: diva2:100008
Note
Addresses: Zheng WT, LINKOPING UNIV, DEPT PHYS, S-58183 LINKOPING, SWEDEN. UNIV UPPSALA, DEPT PHYS, S-75121 UPPSALA, SWEDEN. JILIN UNIV, DEPT MAT SCI, CHANGCHUN 130023, PEOPLES R CHINA.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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