uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Defect evolution in MeV ion-implanted silicon
Uppsala University.
Uppsala University.
Uppsala University.
Uppsala University.
Show others and affiliations
1996 (English)In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN 0168-583X, Vol. 120, no 1-4, 27-32 p.Article in journal (Other scientific) Published
Abstract [en]

Lightly doped silicon samples of both n- and p-type, have been implanted with low doses of H, B and Si ions using energies between 1 and 6 MeV. The resulting electrically active point defects were characterized by deep level transient spectroscopy (DLTS)

Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV , 1996. Vol. 120, no 1-4, 27-32 p.
Keyword [en]
LEVEL TRANSIENT SPECTROSCOPY; INTERSTITIAL CARBON; CRYSTALLINE SILICON; IRRADIATED SILICON; ELECTRON TRAPS; OXYGEN COMPLEX; POINT-DEFECTS; DOPED SILICON; DIFFUSION; SI
Identifiers
URN: urn:nbn:se:uu:diva-74089OAI: oai:DiVA.org:uu-74089DiVA: diva2:102000
Note
Addresses: ROYAL INST TECHNOL, S-16440 KISTA, SWEDEN. UPPSALA UNIV, ION PHYS DIV, DEPT RADIAT SCI, S-75121 UPPSALA, SWEDEN. AUSTRALIAN NATL UNIV, RES SCH PHYS SCI & ENGN, DEPT ELECT MAT ENGN, CANBERRA, ACT 0200, AUSTRALIA.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

Open Access in DiVA

No full text

By organisation
Uppsala University

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 552 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf