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Geometrically Defined All-Diamond Abrasive Surfaces for Pad Conditioning in Chemical Mechanical Polishing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
2006 (English)In: J Electrochem Soc, Vol. 153, no 1, G1-G6 p.Article in journal (Refereed) Published
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2006. Vol. 153, no 1, G1-G6 p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-74714OAI: oai:DiVA.org:uu-74714DiVA: diva2:102624
Available from: 2007-02-14 Created: 2007-02-14 Last updated: 2016-07-11

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Andersson, JoakimJacobson, Staffan

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