Propagation Characteristics of the Fundamental Symmetric Lamb Wave in thin Aluminum Nitride Membranes with Infinite Gratings
2005 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 98, no 8, 084910-084910-7 p.Article in journal (Refereed) Published
A theoretical approach for the analysis of Lamb waves in grating configurations based on the Floquet-Bloch theorem is developed. Subsequently, it is applied for the prediction of the propagation characteristics of the fundamental symmetric Lamb wave (S0) propagating in thin c-oriented aluminum nitride (AlN) membranes with different types of aluminum grating configurations. The calculations indicate the existence of a frequency stop band exhibiting a complex behavior. The proposed analysis is to be used for the design and optimization of high velocity thin-film Lamb wave resonators. It can easily be adapted for the analysis of arbitrary Lamb waves in periodic gratings.
Place, publisher, year, edition, pages
USA: AIP , 2005. Vol. 98, no 8, 084910-084910-7 p.
aluminium compounds, thin films, membranes, surface acoustic waves, acoustic wave propagation
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-75847DOI: 10.1063/1.2113411OAI: oai:DiVA.org:uu-75847DiVA: diva2:103758