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Propagation Characteristics of the Fundamental Symmetric Lamb Wave in thin Aluminum Nitride Membranes with Infinite Gratings
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. (Fasta tillståndets elektronik)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
2005 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 98, no 8, 084910-084910-7 p.Article in journal (Refereed) Published
Abstract [en]

A theoretical approach for the analysis of Lamb waves in grating configurations based on the Floquet-Bloch theorem is developed. Subsequently, it is applied for the prediction of the propagation characteristics of the fundamental symmetric Lamb wave (S0) propagating in thin c-oriented aluminum nitride (AlN) membranes with different types of aluminum grating configurations. The calculations indicate the existence of a frequency stop band exhibiting a complex behavior. The proposed analysis is to be used for the design and optimization of high velocity thin-film Lamb wave resonators. It can easily be adapted for the analysis of arbitrary Lamb waves in periodic gratings.

Place, publisher, year, edition, pages
USA: AIP , 2005. Vol. 98, no 8, 084910-084910-7 p.
Keyword [en]
aluminium compounds, thin films, membranes, surface acoustic waves, acoustic wave propagation
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-75847DOI: 10.1063/1.2113411OAI: oai:DiVA.org:uu-75847DiVA: diva2:103758
Projects
SSF ICTEA
Available from: 2006-02-21 Created: 2009-01-26 Last updated: 2010-06-09Bibliographically approved

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Yantchev, VentsislavKatardjiev, Ilia

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