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Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
2005 (English)In: Proc Int IEEE Ultrason Symp, 2005Conference paper, Published paper (Other academic)
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2005.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-75875OAI: oai:DiVA.org:uu-75875DiVA: diva2:103786
Available from: 2006-03-10 Created: 2006-03-10 Last updated: 2010-05-07Bibliographically approved

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Bjurström, JohanWingqvist, GunillaKatardjiev, Ilia

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