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Shear mode AlN thin film electroacoustic resonator for biosensor applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2005 (English)In: Proceedings International IEEE Ultrasonsonics Symposium, 2005Conference paper, Published paper (Other academic)
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2005.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-75918OAI: oai:DiVA.org:uu-75918DiVA: diva2:103829
Available from: 2006-03-10 Created: 2006-03-10 Last updated: 2010-02-18Bibliographically approved

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Wingqvist, GunillaBjurström, JohanKatardjiev, Ilia

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