uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Microreplication in a silicon processing compatible polymer material
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
Show others and affiliations
2005 (English)In: Journal of Micromechanics and Microengineering, Vol. 15, S116S121- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2005. Vol. 15, S116S121- p.
URN: urn:nbn:se:uu:diva-77175OAI: oai:DiVA.org:uu-77175DiVA: diva2:105087
Available from: 2007-01-23 Created: 2007-01-23 Last updated: 2011-01-11

Open Access in DiVA

No full text

Search in DiVA

By author/editor
Melin, JonasNikolajeff, Fredrik
By organisation
Department of Engineering SciencesMaterials Science

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 191 hits
ReferencesLink to record
Permanent link

Direct link