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Microreplication in a silicon processing compatible polymer material
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
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2005 (English)In: Journal of Micromechanics and Microengineering, Vol. 15, S116S121- p.Article in journal (Refereed) Published
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2005. Vol. 15, S116S121- p.
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URN: urn:nbn:se:uu:diva-77175OAI: oai:DiVA.org:uu-77175DiVA: diva2:105087
Available from: 2007-01-23 Created: 2007-01-23 Last updated: 2011-01-11

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Melin, JonasNikolajeff, Fredrik

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