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Fabrication of Well-Ordered High-Aspect-Ratio Nanopore Arrays in TiO2 Single Crystals
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics.
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2006 (English)In: Nano Letters, Vol. 6, no 5, 1065-1068 p.Article in journal (Refereed) Published
Abstract [en]

In this work a successful method for producing high-aspect-ratio nanopatterned single-crystal TiO2 is presented. The method used is based on nanolithography involving swift heavy ion bombardment through a porous anodic alumina mask. Nanopatterning of large areas allows for fabrication of new devices, for example, photonic crystals and electrodes for energy storage and conversion. Crystalline TiO2 also presents optimal characteristics for optical and catalysis applications. Samples were irradiated by MeV Br7+ ions with fluencies ranging from 7.9 × 1013 to 1.2 × 1015 cm-2. The high-energy Br7+ ions induce latent tracks of amorphous material into the TiO2 crystal suitable for selective etching by hydrofluoric acid. High-aspect-ratio (16) nanopatterned areas, up to 4 mm2, were obtained in a single radiation spot onto single-crystalline TiO2.

Place, publisher, year, edition, pages
2006. Vol. 6, no 5, 1065-1068 p.
National Category
Inorganic Chemistry Engineering and Technology
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URN: urn:nbn:se:uu:diva-80544DOI: 10.1021/nl0602185OAI: oai:DiVA.org:uu-80544DiVA: diva2:108458
Available from: 2007-01-15 Created: 2007-01-15 Last updated: 2016-06-23

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Johansson, AndersSkupinski, MarekJensen, JensPossnert, GöranBoman, MatsHjort, Klas

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