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Laser-assisted deposition of a-C:H at room temperature: Experiment and theory
Uppsala University.
Uppsala University.
Uppsala University.
1997 (English)In: APPLIED SURFACE SCIENCE, Vol. 110, 449-452 p.Other (Other scientific)
Abstract [en]

The laser-induced deposition of a-C:H on Si(100) substrates by photolytic dissociation of methylene-iodide is investigated. The near-UV multiline of an Ar+-laser in parallel configuration to the substrate surface is used to decompose the molecules. A mod

Place, publisher, year, pages
ELSEVIER SCIENCE BV , 1997. Vol. 110, 449-452 p.
Identifiers
URN: urn:nbn:se:uu:diva-80668OAI: oai:DiVA.org:uu-80668DiVA: diva2:108582
Note
Addresses: Piglmayer K, JOHANNES KEPLER UNIV, A-4040 LINZ, AUSTRIA. UNIV UPPSALA, INST CHEM, THIN FILM & SURFACE CHEM GRP, S-75121 UPPSALA, SWEDEN.Available from: 2008-10-17 Created: 2008-10-17

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