Laser assisted chemical vapour deposition of hydrogen containing amorphous carbon at room temperature
1997 (English)In: APPLIED SURFACE SCIENCE, Vol. 110, 549-553 p.Other (Other scientific)
Hydrogen containing amorphous carbon films were deposited by photolytic decomposition of methylene iodide, CH2I2, at room temperature. An excimer laser operated at 193 nm was used as the excitation source. Smooth and adherent films were produced on Si(10
Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV , 1997. Vol. 110, 549-553 p.
PHOTOINDUCED DISSOCIATION; SURFACE; CH2I2
IdentifiersURN: urn:nbn:se:uu:diva-80682OAI: oai:DiVA.org:uu-80682DiVA: diva2:108596
Addresses: Stenberg G, UNIV UPPSALA, DEPT ORGAN CHEM, BOX 531, S-75121 UPPSALA, SWEDEN.2008-10-172008-10-17