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Thickness measurement of light elemental films
Uppsala University.
Uppsala University.
1996 (English)In: DIAMOND AND RELATED MATERIALS, Vol. 5, no 12, 1444-1449 p.Other (Other scientific)
Abstract [en]

A non-destructive method for measuring the thickness of films composed of light elements has been developed. The method utilizes a conventional electron microscope equipped with a windowless energy-dispersive X-ray spectrometer; The film thickness is det

Place, publisher, year, pages
ELSEVIER SCIENCE SA LAUSANNE , 1996. Vol. 5, no 12, 1444-1449 p.
Keyword [en]
amorphous hydrogenated carbon coating; scanning electron microscopy; X-rays
Identifiers
URN: urn:nbn:se:uu:diva-82685OAI: oai:DiVA.org:uu-82685DiVA: diva2:110591
Note
Addresses: Stenberg G, UNIV UPPSALA, DEPT INORGAN CHEM, THIN FILM & SURFACE CHEM GRP, BOX 531, S-75121 UPPSALA, SWEDEN.Available from: 2008-10-17 Created: 2008-10-17

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