uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Thermodynamic modelling of MOCVD of ZrO2 from beta-diketonates and different oxygen sources
Uppsala University.
Uppsala University.
1997 (English)In: SURFACE & COATINGS TECHNOLOGY, Vol. 88, no 1-3, 255-263 p.Other (Other scientific)
Abstract [en]

Chemical vapour deposition (CVD) of ZrO2 from three different beta-diketonates - zirconium acetylacetonate, zirconium tetramethylheptanedionate and zirconium trifluoroacetyl-acetonate - is thermodynamically investigated. O-2, H2O and N2O were used as oxy

Place, publisher, year, pages
ELSEVIER SCIENCE SA LAUSANNE , 1997. Vol. 88, no 1-3, 255-263 p.
Keyword [en]
MOCVD; ZrO2; thermodynamics; CHEMICAL-VAPOR-DEPOSITION; THIN-FILMS; MECHANISMS
Identifiers
URN: urn:nbn:se:uu:diva-82715OAI: oai:DiVA.org:uu-82715DiVA: diva2:110621
Note
Addresses: Fredriksson E, UNIV UPPSALA, DEPT INORGAN CHEM, THIN FILM & SURFACE CHEM GRP, BOX 531, S-75121 UPPSALA, SWEDEN.Available from: 2008-10-17 Created: 2008-10-17

Open Access in DiVA

No full text

By organisation
Uppsala University

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 524 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf