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Thermodynamic modelling of MOCVD of ZrO2 from beta-diketonates and different oxygen sources
Uppsala University.
Uppsala University.
1997 (English)In: SURFACE & COATINGS TECHNOLOGY, Vol. 88, no 1-3, 255-263 p.Other (Other scientific)
Abstract [en]

Chemical vapour deposition (CVD) of ZrO2 from three different beta-diketonates - zirconium acetylacetonate, zirconium tetramethylheptanedionate and zirconium trifluoroacetyl-acetonate - is thermodynamically investigated. O-2, H2O and N2O were used as oxy

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA LAUSANNE , 1997. Vol. 88, no 1-3, 255-263 p.
Keyword [en]
URN: urn:nbn:se:uu:diva-82715OAI: oai:DiVA.org:uu-82715DiVA: diva2:110621
Addresses: Fredriksson E, UNIV UPPSALA, DEPT INORGAN CHEM, THIN FILM & SURFACE CHEM GRP, BOX 531, S-75121 UPPSALA, SWEDEN.Available from: 2008-10-17 Created: 2008-10-17

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