uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
CVD growth of cubic boron nitride: A theoretical/experimental approach
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
2006 (English)In: Thin Solid Films, Vol. 515, no 2, p. 401-406Article in journal (Refereed) Published
Abstract [en]

Similarities and dissimilarities in the growth of diamond vs. c-BN, in the present series of investigations, have been studied using quantum mechanical calculations. Hydrogen species have been observed to be very effective in stabilising both types of compounds. Very large similarities have also been observed when considering the adsorption of various growth species to these materials. However, it was found necessary to avoid mixtures of B- and N-containing species in the gas phase during c-BN growth, since they should most probably result in a mixture of these species also on the (111) and (110) surfaces. In addition, a careful gas phase design was found necessary in order to avoid a preferential initial growth of h-BN. These theoretical results can be used as guide lines in striving towards a thin film deposition of cubic boron nitride using gentle CVD methods like atomic layer deposition.

Place, publisher, year, edition, pages
2006. Vol. 515, no 2, p. 401-406
Keywords [en]
BN, Growth, Surface processes, Theoretical, Quantum chemistry, ALD, Diamond
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-82971DOI: doi:10.1016/j.tsf.2005.12.220OAI: oai:DiVA.org:uu-82971DiVA, id: diva2:110878
Available from: 2006-10-10 Created: 2006-10-10 Last updated: 2011-01-11

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full texthttp://www.sciencedirect.com

Authority records BETA

Larsson, Karin

Search in DiVA

By author/editor
Larsson, Karin
By organisation
Department of Materials ChemistryInorganic Chemistry
Inorganic Chemistry

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 961 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf