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Dynamic behaviour of the reactive sputtering process
Kubart, Tomas
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Kappertz, Oliver
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Nyberg, Tomas
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Berg, Sören
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2006 (English)
In:
Thin Solid Films, Vol. 515, p. 421-424
Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2006. Vol. 515, p. 421-424
National Category
Engineering and Technology
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URN:
urn:nbn:se:uu:diva-84278
OAI: oai:DiVA.org:uu-84278
DiVA, id:
diva2:112186
Available from:
2006-11-14
Created:
2006-11-14
Last updated:
2016-06-23
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Kubart, Tomas
Kappertz, Oliver
Nyberg, Tomas
Berg, Sören
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ieee
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ieee
modern-language-association
vancouver
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de-DE
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en-US
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