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Decreasing the optical path length in an optoelectronic module using silicon micromachining
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1999 (English)In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 9, no 2, 127-129 p.Article in journal (Refereed) Published
Abstract [en]

In order to decrease the optical path length of an optoelectronic module, two ways of achieving 45 degrees silicon mirrors with trenches defining the mirror size are presented: dicing, and dry etching. The dicing was performed with a Disco DAD 361 dicing

Place, publisher, year, edition, pages
1999. Vol. 9, no 2, 127-129 p.
Keyword [en]
PHOTOLITHOGRAPHY; GROOVES
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-84630OAI: oai:DiVA.org:uu-84630DiVA: diva2:112538
Note
Addresses: Richard A, Univ Uppsala, Angstrom Lab, POB 534, S-75121 Uppsala, Sweden. Univ Uppsala, Angstrom Lab, S-75121 Uppsala, Sweden.Available from: 2007-02-28 Created: 2007-02-28 Last updated: 2012-06-20

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Backlund, Ylva

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