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Evaluation of mechanical materials properties by means of surface micromachined structures
Uppsala University.
Uppsala University.
1999 (English)In: SENSORS AND ACTUATORS A-PHYSICAL, ISSN 0924-4247, Vol. 74, no 1-3, 126-133 p.Article in journal (Other scientific) Published
Abstract [en]

For all micromechanical devices, mechanical properties such as elasticity constants, internal stresses, fracture limits and, for ductile materials, yield limits and strain-hardening behaviour, are of paramount importance in design and use. Furthermore, me

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 1999. Vol. 74, no 1-3, 126-133 p.
Keyword [en]
microstructure technology; surface micromachined structures; tensile testing; internal stress; fracture properties; THIN-FILMS; TENSILE-STRENGTH; POLYSILICON
Identifiers
URN: urn:nbn:se:uu:diva-84653OAI: oai:DiVA.org:uu-84653DiVA: diva2:112561
Note
Addresses: Schweitz JA, Univ Uppsala, Angstrom Lab, Dept Mat Sci, Box 534, SE-75121 Uppsala, Sweden. Univ Uppsala, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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