Low cost micromachined mirrors for display systems
1999 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 9, no 1, 85-88 p.Article in journal (Refereed) Published
A concept for the fabrication of low cost resonant scanning miners using standard microstructure technology is proposed. To demonstrate the process a mirror device for a head mounted display system was designed and fabricated. The mirror was successfully
Place, publisher, year, edition, pages
1999. Vol. 9, no 1, 85-88 p.
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:uu:diva-84655DOI: 10.1088/0960-1317/9/1/311OAI: oai:DiVA.org:uu-84655DiVA: diva2:112563
Addresses: Vangbo M, Uppsala Univ, Angstrom Lab, Box 534, SE-75221 Uppsala, Sweden. Uppsala Univ, Angstrom Lab, SE-75221 Uppsala, Sweden.2007-02-282007-02-282013-02-15Bibliographically approved