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Low cost micromachined mirrors for display systems
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1999 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 9, no 1, 85-88 p.Article in journal (Refereed) Published
Abstract [en]

A concept for the fabrication of low cost resonant scanning miners using standard microstructure technology is proposed. To demonstrate the process a mirror device for a head mounted display system was designed and fabricated. The mirror was successfully

Place, publisher, year, edition, pages
1999. Vol. 9, no 1, 85-88 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-84655DOI: 10.1088/0960-1317/9/1/311OAI: oai:DiVA.org:uu-84655DiVA: diva2:112563
Note

Addresses: Vangbo M, Uppsala Univ, Angstrom Lab, Box 534, SE-75221 Uppsala, Sweden. Uppsala Univ, Angstrom Lab, SE-75221 Uppsala, Sweden.

Available from: 2007-02-28 Created: 2007-02-28 Last updated: 2017-12-14Bibliographically approved

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Backlund, Ylva

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