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Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1998 (English)In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 8, no 1, 1-6 p.Article in journal (Refereed) Published
Abstract [en]

The anisotropic etching behaviour of monocrystalline quartz is studied both experimentally and with computer simulations. The etch rate minima were identified as the crystal planes m, r, r(2), s and s(4). Various shapes and initial structures, both concav

Place, publisher, year, edition, pages
1998. Vol. 8, no 1, 1-6 p.
Keyword [en]
SILICON; GROWTH
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-84701OAI: oai:DiVA.org:uu-84701DiVA: diva2:112609
Note
Addresses: Rangsten P, Univ Uppsala, Angstrom Lab, Dept Mat Sci, Box 534, S-75121 Uppsala, Sweden. Univ Uppsala, Angstrom Lab, Dept Mat Sci, S-75121 Uppsala, Sweden.Available from: 2007-03-01 Created: 2007-03-01 Last updated: 2012-06-20

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Katardjiev, IliaBacklund, Ylva

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