A lateral symmetrically bistable buckled beam
1998 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 8, no 1, 29-32 p.Article in journal (Refereed) Published
We have micromachined a lateral symmetrically bistable buckled beam for snap-in holding structures by oxidizing released beams micromachined on thick silicon-on-insulator wafers. The wafers were prepared by bonding and chemical mechanical polishing, and t
Place, publisher, year, edition, pages
1998. Vol. 8, no 1, 29-32 p.
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:uu:diva-84702DOI: 10.1088/0960-1317/8/1/005OAI: oai:DiVA.org:uu-84702DiVA: diva2:112610
Addresses: Vangbo M, Univ Uppsala, Angstrom Lab, Dept Mat Sci, Box 534, S-75121 Uppsala, Sweden. Univ Uppsala, Angstrom Lab, Dept Mat Sci, S-75121 Uppsala, Sweden.2007-03-012007-03-012013-02-15Bibliographically approved