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Passive and fixed alignment of devices using flexible silicon elements formed by selective etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1998 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 8, no 1, 39-44 p.Article in journal (Refereed) Published
Abstract [en]

Assembly systems consisting of aligning pits combined with flexible holding elements have been produced for both passive and fixed alignment of devices such as chips and optical fibres. The free-standing holding elements were fabricated in bulk silicon us

Place, publisher, year, edition, pages
1998. Vol. 8, no 1, 39-44 p.
Keyword [en]
STOP
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-84703DOI: 10.1088/0960-1317/8/1/007OAI: oai:DiVA.org:uu-84703DiVA: diva2:112611
Note

Addresses: Strandman C, Univ Uppsala, Angstrom Lab, Box 534, S-75121 Uppsala, Sweden. Univ Uppsala, Angstrom Lab, S-75121 Uppsala, Sweden.

Available from: 2007-03-01 Created: 2007-03-01 Last updated: 2012-09-28Bibliographically approved

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Backlund, Ylva

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