uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
In situ diagnostic studies of reactive co-sputtering from two targets by means of soft x-ray and optical emission spectroscopy
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Solid State Physics. Fasta tillståndets elektronik.
Physics, Department of Physics. Department of Engineering Sciences, Electronics. Solid State Physics.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Solid State Physics. Fasta tillståndets fysik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Solid State Physics. Fasta tillståndets elektronik.
Show others and affiliations
1997 (English)In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, ISSN 0734-2101, Vol. 15, no 1, p. 145-148Article in journal (Refereed) Published
Abstract [en]

Fabrication of electronic and optical devices involves synthesis of tailor-made materials with complex composition. Reactive co-sputtering from two targets is a suitable process for fabrication of, e.g., a two-element nitride compound material. The compos

Place, publisher, year, edition, pages
1997. Vol. 15, no 1, p. 145-148
Keywords [en]
CHEMICAL-ANALYSIS; IN-SITU; DEPOSITION; FILM; SPECTROMETRY
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-84715OAI: oai:DiVA.org:uu-84715DiVA, id: diva2:112623
Note
Addresses: Nyberg T, UNIV UPPSALA, ANGSTROM CONSORTIUM, BOX 534, S-75121 UPPSALA, SWEDEN.Available from: 2007-03-05 Created: 2007-03-05 Last updated: 2011-01-15

Open Access in DiVA

No full text in DiVA

Authority records BETA

Nyberg, TomasNordgren, JosephBerg, Sören

Search in DiVA

By author/editor
Nyberg, TomasNordgren, JosephBerg, Sören
By organisation
Department of Materials ScienceElectronicsSolid State PhysicsDepartment of Physics
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 1018 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf