uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Abnormal High Rate Deposition of TiN Films by the Radio Frequency Plasma Jet System
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1995 (English)In: J Electrochem Soc, ISSN 0013-4651, Vol. 142, no 3, 883-887 p.Article in journal (Refereed) Published
Abstract [en]

Radio frequency Ar and Ar + N-2 plasma jets generated in a hollow electrode terminated by a small size Ti nozzle were used for deposition of Ti and TiN films. The regime with low content of reactive gas resulted in an extreme enhancement of TiN deposition

Place, publisher, year, edition, pages
1995. Vol. 142, no 3, 883-887 p.
Keyword [en]
HOLLOW-CATHODE DISCHARGE
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-84726OAI: oai:DiVA.org:uu-84726DiVA: diva2:112634
Note
Addresses: BARANKOVA H, UPPSALA UNIV, ANGSTROM CONSORTIUM THIN FILM PROC, S-75121 UPPSALA, SWEDEN. UPPSALA UNIV, DEPT ELECTR, S-75121 UPPSALA, SWEDEN.Available from: 2007-03-07 Created: 2007-03-07 Last updated: 2011-01-15

Open Access in DiVA

No full text

Authority records BETA

Barankova, HanaBardos, LadislavBerg, Sören

Search in DiVA

By author/editor
Barankova, HanaBardos, LadislavBerg, Sören
By organisation
Department of Materials ScienceElectronics
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 914 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf