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EFFECT OF ATOMIC-HYDROGEN ON THE SURFACE-TOPOGRAPHY OF CHEMICALLY VAPOR-DEPOSITED DIAMOND FILMS - AN ATOMIC-FORCE MICROSCOPY STUDY
Uppsala University.
Uppsala University.
1995 (English)In: DIAMOND AND RELATED MATERIALS, ISSN 0925-9635, Vol. 4, no 2, 155-163 p.Article in journal (Other scientific) Published
Abstract [en]

Atomic hydrogen is one of the key constituents in the growth of CVD diamond. In this work the effect of atomic hydrogen on the surface topography of CVD diamond films has been investigated. Diamond films were deposited on silicon substrates by the hot fil

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA LAUSANNE , 1995. Vol. 4, no 2, 155-163 p.
Keyword [en]
ATOMIC FORCE MICROSCOPY; ATOMIC HYDROGEN; DIAMOND; ETCHING; SPECTROSCOPY; GRAPHITE; GROWTH
Identifiers
URN: urn:nbn:se:uu:diva-84727OAI: oai:DiVA.org:uu-84727DiVA: diva2:112635
Note
Addresses: JOHANSSON E, UNIV UPPSALA, ANGSTROM CONSORTIUM THIN FILM PROC, POB 531, S-75121 UPPSALA, SWEDEN.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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