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In situ scanning force microscopy study of TiN layers in sulphuric acid
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
Technology, Department of Materials Science. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
1997 (English)In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN 1071-1023, Vol. 15, no 6, 1865-1870 p.Article in journal (Refereed) Published
Abstract [en]

Morphological changes of sputter-deposited TiN films in 0.1 M sulphuric acid have been followed in situ with scanning force microscopy at different potentials. Disappearance of small structures was observed with increasing potential up to 1.2 V. A furthe

Place, publisher, year, edition, pages
1997. Vol. 15, no 6, 1865-1870 p.
Keyword [en]
RAY PHOTOELECTRON-SPECTROSCOPY; CHEMICAL VAPOR-DEPOSITION; TITANIUM NITRIDE; FILMS; SURFACE; ELECTRODES; OXIDATION; OXIDES; XPS
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-84812OAI: oai:DiVA.org:uu-84812DiVA: diva2:112720
Note
Angstrom Lab, Dept Inorgan Chem, S-75121 Uppsala, Sweden. Univ Uppsala, Angstrom Lab, Dept Mat Sci, S-75121 Uppsala, Sweden.Available from: 2005-10-11 Created: 2005-10-11 Last updated: 2011-01-15

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Carlsson, Jan-Otto

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