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Microwave annealing as a low thermal budget technique for ZnO thin-film transistors fabricated using atomic layer deposition
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2017 (English)In: IEEE Electron Device Letters, ISSN 0741-3106, E-ISSN 1558-0563, Vol. 38, 1390- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2017. Vol. 38, 1390- p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-332717OAI: oai:DiVA.org:uu-332717DiVA: diva2:1153911
Available from: 2017-10-31 Created: 2017-10-31 Last updated: 2017-11-01

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