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Chemical vapor deposition of TiN on transition metal substrates
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Seco Tools AB.
AB Sandvik Coromant.
Chalmers University of Technology.
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(English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347Article in journal (Refereed) Epub ahead of print
Keyword [en]
CVD, TiN, Alternate binder phase, Thermodynamic calculations
National Category
Inorganic Chemistry
Research subject
Chemistry with specialization in Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-335743DOI: 10.1016/j.surfcoat.2017.11.063OAI: oai:DiVA.org:uu-335743DiVA: diva2:1163778
Available from: 2017-12-08 Created: 2017-12-08 Last updated: 2017-12-08

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Publisher's full texthttps://www.sciencedirect.com/science/article/pii/S0257897217312100
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Inorganic Chemistry
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