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Transparent AlN-based nitride films: keynote lecture
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.ORCID iD: 0000-0001-8617-4834
2016 (English)Conference paper, Oral presentation only (Other academic)
Abstract [en]

The lecture will give an overview of recent research on AlN-based thin film materials.Focus of the lecture will be on coating structure / microstructure, the materialproperties, and their correlations. AlN is a well-known wide band gap semiconductorwhich is transparent into the UV-range. By alloying AlN new materials with modifiedoptical, mechanical and electrical properties can be attained. The alloying can lead tothree types of coating structures: solid solution phases where the alloying elementsubstitutes Al or N in the wurzite type AlN structure; nanocomposites where thealloying leads to the formation of a second phase and a two-phase microstructure; ortotally amorphous or glass-like materials. What is formed will depend on the alloyingelements, their concentrations, and the growth conditions.Specifically, structure and properties of AlN-based coatings alloyed in two directionswill be presented: alloying with group 14 elements (Si, Ge, or Sn), and with oxygen.By this double alloying, producing quaternary oxynitride materials, a wide range ofmechanical and optical properties becomes attainable, e.g. achieving hardnesses upto 32 GPa, and a continuously variable optical band gap between 2.5 and 6.9 eV.Such properties could e.g. be utilised in protective optical coatings with tuneableabsorption or decorative coating.Coatings were deposited by reactive magnetron sputtering, using elemental targetsand varied ratios of the three process gases Ar, N2 and O2. Deposition was generallycarried out at low temperatures to allow formation of metastable solid solution phases.Coatings have been characterised using mainly X-ray diffraction (XRD), photoelectronspectroscopy (XPS) and scanning electron microscopy. Optical and mechanicalproperties have been evaluated using nanoindentation and UV-vis spectroscopy.

Place, publisher, year, edition, pages
2016.
National Category
Inorganic Chemistry Other Materials Engineering
Identifiers
URN: urn:nbn:se:uu:diva-336812OAI: oai:DiVA.org:uu-336812DiVA, id: diva2:1167132
Conference
PSE 2016, Garmisch-Partenkirchen
Available from: 2017-12-18 Created: 2017-12-18 Last updated: 2017-12-18

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