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Reactively Sputtered Multicomponent (TiZrHfVNb)N Thin Films
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry. (Oorganisk kemi)ORCID iD: 0000-0001-7266-0022
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry. (Oorganisk kemi)ORCID iD: 0000-0001-8617-4834
2017 (English)Conference paper, Oral presentation only (Other academic)
Place, publisher, year, edition, pages
2017.
National Category
Inorganic Chemistry Materials Chemistry
Research subject
Chemistry with specialization in Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-337000OAI: oai:DiVA.org:uu-337000DiVA: diva2:1167944
Conference
International Conference on Metallurgical Coatings and Thin Films
Available from: 2017-12-19 Created: 2017-12-19 Last updated: 2017-12-19

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