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Reactively Sputtered Al-Ge-O-N Thin Films
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry. (Oorganisk kemi)ORCID iD: 0000-0001-7266-0022
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry. (Oorganisk kemi)ORCID iD: 0000-0001-8617-4834
2017 (English)Conference paper, Poster (with or without abstract) (Other academic)
Place, publisher, year, edition, pages
2017.
National Category
Inorganic Chemistry
Research subject
Chemistry with specialization in Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-337002OAI: oai:DiVA.org:uu-337002DiVA, id: diva2:1167950
Conference
Inorganic Days
Available from: 2017-12-19 Created: 2017-12-19 Last updated: 2017-12-19

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