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Microstructure Technology in Quartz and Silicon
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1998 (English)Licentiate thesis, monograph (Other scientific)
Place, publisher, year, edition, pages
1998.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-85992OAI: oai:DiVA.org:uu-85992DiVA: diva2:116801
Presentation
(English)
Available from: 2007-03-01 Created: 2007-03-01 Last updated: 2010-03-05

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CiteExportLink to record
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Citation style
  • apa
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