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Anodic Bonding for Microsystem Applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2000 (English)Licentiate thesis, monograph (Other scientific)
Place, publisher, year, edition, pages
2000.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-85997OAI: oai:DiVA.org:uu-85997DiVA: diva2:116806
Presentation
(English)
Available from: 2007-03-01 Created: 2007-03-01 Last updated: 2010-03-05

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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