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Laser-Assisted ALD of BN Thin Films
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
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2003 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731Article in journal (Refereed) Published
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2003.
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Inorganic Chemistry
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URN: urn:nbn:se:uu:diva-338695OAI: oai:DiVA.org:uu-338695DiVA, id: diva2:1173180
Available from: 2018-01-11 Created: 2018-01-11 Last updated: 2018-01-11

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Carlsson, Jan-OttoLarsson, Karin

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