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Influence of oxygen content on structure and material properties of reactively sputtered Al-Ge-O-N thin films
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.ORCID iD: 0000-0001-8617-4834
2018 (English)In: Journal of Alloys and Compounds, ISSN 0925-8388, E-ISSN 1873-4669, Vol. 738, p. 515-527Article in journal (Refereed) Published
Abstract [en]

Ternary Al-Ge-N and quaternary Al-Ge-O-N coatings were deposited by reactive dc magnetron cosputtering of Al and Ge targets in an Ar/N-2 or Ar/N-2/O-2 atmosphere at a substrate temperature of 250 degrees C. The structure and material properties of the coatings were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), nanoindentation, UV-vis spectroscopy and optical profilometry. In agreement with literature, the ternary Al-Ge-N coatings were found to be nanocomposite materials with nanocrystalline (Al1-xGex) N-y solid solution phase in a Ge3N4-z amorphous matrix. The Al-Ge-O-N coatings consisted of a nanocrystalline wurzite-type (Al1-xGex)( N1-yOy) solid solution phase for low oxygen concentrations with a possible co-existence of an amorphous Ge-N matrix phase. For higher O contents, the coatings became X-ray amorphous. The mechanical properties of the Al-Ge-O-N films were improved for low oxygen content, as compared to the ternary Al-Ge-N samples, showing an increase in hardness up to 29 GPa and Young's modulus to 320 GPa. The oxygen addition also resulted in an additional design parameter of the optical properties compared to the ternary Al-Ge-N films. The optical absorption edge was thus tuneable towards both shorter and longer wavelength by changing the O and Ge content respectively, and ranged from 302 to 373 nm, corresponding to an optical bandgap (E-04) between 4.1 and 3.3 eV. After annealing of the Al-Ge-O-N coatings in ultra-high vacuum at 500 degrees C, indications of increased thermal stability for the coating with high oxygen content were observed. For the annealed Al-Ge-O-N films the mechanical properties were improved upon heat treatment, while the optical properties were only slightly changed. These results suggests that coatings of the Al-Ge-O-N system could be suitable as protective optical coatings at elevated temperatures.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2018. Vol. 738, p. 515-527
Keywords [en]
Reactive sputtering, Al-Ge-O-N, Optical properties, Hard coatings, Thermal stability
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-341556DOI: 10.1016/j.jallcom.2017.12.185ISI: 000419214800062OAI: oai:DiVA.org:uu-341556DiVA, id: diva2:1182490
Funder
Swedish Research Council, C0514401Swedish Foundation for Strategic Research , RIF14-0053Available from: 2018-02-13 Created: 2018-02-13 Last updated: 2018-03-09Bibliographically approved
In thesis
1. Multicomponent Nitride Thin Films by Reactive Magnetron Sputtering
Open this publication in new window or tab >>Multicomponent Nitride Thin Films by Reactive Magnetron Sputtering
2018 (English)Licentiate thesis, comprehensive summary (Other academic)
Place, publisher, year, edition, pages
Uppsala: Uppsala universitet, 2018
National Category
Inorganic Chemistry
Identifiers
urn:nbn:se:uu:diva-345154 (URN)
Presentation
2018-03-06, 10:15 (English)
Opponent
Supervisors
Available from: 2018-03-09 Created: 2018-03-08 Last updated: 2018-03-09Bibliographically approved

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Johansson, KristinaLewin, Erik

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