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HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films
Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany..
Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany.;GTT Technol, Kaiserstr 103, D-52134 Herzogenrath, Germany..
Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany..
Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany..
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2017 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 145, p. 285-289Article in journal (Refereed) Published
Abstract [en]

The effect of target power density, substrate bias potential and substrate temperature on the thin film composition was studied. A Cr-Al-C composite target was sputtered utilizing direct current (DCMS: 2.3 W/cm(2)) and high power pulsed magnetron sputtering (HPPMS: 373 W/cm(2)) generators. At floating potential, all Cr-Al-C thin films showed similar compositions, independently of the applied target power density. However, as substrate bias potential was increased to -400 V, aluminum deficiencies by a factor of up to 1.6 for DCMS and 4.1 for HPPMS were obtained. Based on the measured ion currents at the substrate, preferential re-sputtering of Al is suggested to cause the dramatic Al depletion. As the substrate temperature was increased to 560 degrees C, the Al concentration was reduced by a factor of up to 1.9 compared to the room temperature deposition. This additional reduction may be rationalized by thermally induced desorption being active in addition to re-sputtering. 

Place, publisher, year, edition, pages
PERGAMON-ELSEVIER SCIENCE LTD , 2017. Vol. 145, p. 285-289
Keywords [en]
Thin films, DCMS, HPPMS, Composite/compound target, Target power density, Substrate bias potential
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:uu:diva-340698DOI: 10.1016/j.vacuum.2017.08.048ISI: 000413612000041OAI: oai:DiVA.org:uu-340698DiVA, id: diva2:1184629
Funder
German Research Foundation (DFG), SPP 1568 SCHN 735/19-2Available from: 2018-02-21 Created: 2018-02-21 Last updated: 2018-02-21Bibliographically approved

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Primetzhofer, Daniel

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