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Multicomponent Hf-Nb-Ti-V-Zr nitride coatings by reactive sputter deposition
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry. (Oorganisk kemi)ORCID iD: 0000-0001-7266-0022
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry. (Oorganisk kemi)ORCID iD: 0000-0001-8617-4834
(English)Manuscript (preprint) (Other academic)
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-345151OAI: oai:DiVA.org:uu-345151DiVA, id: diva2:1188637
Available from: 2018-03-08 Created: 2018-03-08 Last updated: 2018-03-09
In thesis
1. Multicomponent Nitride Thin Films by Reactive Magnetron Sputtering
Open this publication in new window or tab >>Multicomponent Nitride Thin Films by Reactive Magnetron Sputtering
2018 (English)Licentiate thesis, comprehensive summary (Other academic)
Place, publisher, year, edition, pages
Uppsala: Uppsala universitet, 2018
National Category
Inorganic Chemistry
Identifiers
urn:nbn:se:uu:diva-345154 (URN)
Presentation
2018-03-06, 10:15 (English)
Opponent
Supervisors
Available from: 2018-03-09 Created: 2018-03-08 Last updated: 2018-03-09Bibliographically approved

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