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Mass sensitivity of multilayer thin film resonant BAW sensors
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films)
2008 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 148, no 1, 88-95 p.Article in journal (Refereed) Published
Abstract [en]

Abstract: A systematic study of the mass sensitivity and its dependence on the material's properties and thicknesses in composite multilayer Thin Film Bulk Acoustic Resonators (FBAR) is presented. The Mason transmission line model has been employed in combination with the acoustic energy balance principle for the determination of the FBAR mass sensitivity. The results have been experimentally verified. Further, the mass sensitivity dependence on various parameters has been studied and correlated with wave reflection and interference within the composite structure in addition to the well-known dependence on resonator acoustic impedance and operation frequency. The mass sensitivity for both the fundamental and the second harmonic mode of operation has been studied in view of their practical relevance. In particular, sensitivity amplification induced by the presence of an on-top deposited low acoustic impedance layer has been identified for the first harmonic and its potential applicability discussed in terms of gas and in-liquid sensing. Optimized structures for both sensing applications are suggested by considering the overall sensor resolution defined by both the mass sensitivity and the FBAR performance.

Place, publisher, year, edition, pages
2008. Vol. 148, no 1, 88-95 p.
Keyword [en]
Mass sensitivity, Bulk acoustic resonator, FBAR, Sensitivity amplification
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electronics
Identifiers
URN: urn:nbn:se:uu:diva-86872DOI: 10.1016/j.sna.2008.07.023ISI: 000260804500015OAI: oai:DiVA.org:uu-86872DiVA: diva2:127528
Projects
WISENET
Available from: 2008-12-09 Created: 2008-12-08 Last updated: 2016-04-13Bibliographically approved
In thesis
1. Thin Film Electroacoustic Devices for Biosensor Applications
Open this publication in new window or tab >>Thin Film Electroacoustic Devices for Biosensor Applications
2009 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Biosensors are today important devices within various application areas.

In this thesis a new type of label-free biosensor device is studied, which is fabricated using the same processes used for the fabrication of integrated circuits. This enables tighter integration and further sensors/biosensor miniaturization. The device is a so-called Thin Film Bulk Acoustic Resonator (FBAR). Within this thesis a low temperature reactive sputtering process for growing AlN thin films with a c-axis inclination of 20-30o has been developed. This enables shear mode FBAR fabrication suitable for in-liquid operation, essential for biosensor applications. Shear mode FBARs were fabricated operating at frequencies above 1GHz exhibiting Q values of 100-200 in water and electromechanical coupling factors kt2 of about 1.8%. This made it possible to move the thickness excited shear mode sensing of biological layers into a new sensing regime using substantially higher operation frequencies than the conventionally used quartz crystal microbalance (QCM) operating at 5-20MHz. Measured noise levels of shear mode FBARs in contact with water showed the resolution to be in the range 0.3ng/cm2 to 7.5ng/cm2. This demonstrated the FBAR resolution without any averaging or additional stabilization measures already to be in the same range as the conventional QCM (5ng/cm2), suggesting that FBARs may be a competitive and low cost alternative to QCM. The linear thickness limit for sensing of biomolecular layers was concluded to be larger than the thickness of the majority of the molecular systems envisaged for FBAR biosensor applications. A temperature compensated shear mode FBAR composite structure was demonstrated with retained coupling factor and Q-value by utilizing the second mode of operation. Understanding has been gained on the sensor operation as well as on how the design parameters influence its performance. Specifically, sensitivity amplification utilizing low acoustic impedance layers in the FBAR structure has been demonstrated and explained. Further, temperature compensated Lamb mode (FPAR) devices were also studied and demonstrated with optimized electromechanical couplings.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2009. 96 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 609
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electronics
Identifiers
urn:nbn:se:uu:diva-89424 (URN)978-91-554-7432-4 (ISBN)
Public defence
2009-03-27, Å2005, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 10:15 (English)
Opponent
Supervisors
Projects
wisenet
Available from: 2009-03-06 Created: 2009-02-13 Last updated: 2011-01-17Bibliographically approved

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Wingqvist, GunillaYantchev, VentsislavKatardjiev, Ilia

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