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Synthesis and characterization of (Ti1-xAlx)B2+Delta thin films from combinatorial magnetron sputtering
Linkoping Univ, Thin Film Phys Div, Dept Phys Chem & Biol IFM, S-58183 Linkoping, Sweden.
Linkoping Univ, Thin Film Phys Div, Dept Phys Chem & Biol IFM, S-58183 Linkoping, Sweden.
Linkoping Univ, Thin Film Phys Div, Dept Phys Chem & Biol IFM, S-58183 Linkoping, Sweden.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
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2019 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 669, p. 181-187Article in journal (Refereed) Published
Abstract [en]

(Ti1-xAlx)B2+Delta films with a lateral composition gradient of x = [0.30-0.66] and Delta = [0.07-1.22] were deposited on an Al2O3 wafer by dual magnetron sputtering at 400 degrees C from sintered TiB2 and AlB2 targets. Composition analysis indicates that higher Ti:Al ratios favor overstoichiometry in B and a reduced incorporation of O. Transmission electron microscopy reveals distinctly different microstructures of Ti- and Al-rich compositions, with formation of characteristic conical growth features for the latter along with a lower degree of crystallinity and significantly less tissue phase from B segregation at the grain boundaries. For Al-rich films, phase separation into Ti- and Al-rich diboride nanometer-size domains is observed and interpreted as surface-initiated spinodal decomposition. The hardness of the films ranges from 14 to 28 GPa, where the higher values were obtained for the Ti-rich regions of the metal boride.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2019. Vol. 669, p. 181-187
Keywords [en]
Titanium aluminium diboride, Thin films, Combinatorial sputtering, Mechanical properties, Phase decomposition
National Category
Materials Chemistry Condensed Matter Physics
Identifiers
URN: urn:nbn:se:uu:diva-372875DOI: 10.1016/j.tsf.2018.10.042ISI: 000453405600026OAI: oai:DiVA.org:uu-372875DiVA, id: diva2:1277283
Funder
Knut and Alice Wallenberg Foundation, KAW 2015.0043Swedish Research Council, 330-2014-6336Swedish Research Council, 2016-04412Swedish Research Council, 642-2013-8020Swedish Foundation for Strategic Research Available from: 2019-01-10 Created: 2019-01-10 Last updated: 2019-01-10Bibliographically approved

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Berastegui, PedroJansson, Ulf

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