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A model of DC reactive magnetron sputtering for graded solar thermal absorbers
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics. (Thin Films Group)
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2008 (English)In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 100, no 8, 082024- p.Article in journal (Refereed) Published
Abstract [en]

In this work we present process modelling of reactive in-line sputtering. Although modelling of reactive sputtering is often used, most models are based on assumptions which make them insufficient for use in this case. The presented model takes into account a realistic deposition rate profile and distribution of reactive gas pressure. The model has been applied to reactive sputter deposition of graded solar thermal absorbers. It has been shown that the presented model represents a simple alternative to complex Monte Carlo simulations while still representing all important features of the process.

Place, publisher, year, edition, pages
2008. Vol. 100, no 8, 082024- p.
National Category
Physical Sciences Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-87611DOI: 10.1088/1742-6596/100/8/082024ISI: ´000275655200302OAI: oai:DiVA.org:uu-87611DiVA: diva2:132790
Available from: 2009-01-02 Created: 2009-01-02 Last updated: 2017-12-14

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Publisher's full texthttp://www.iop.org/EJ/abstract/-search=60330193.2/1742-6596/100/8/082024

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Kubart, TomasWingqvist, GunillaNyberg, TomasWäckelgård, EwaBerg, Sören

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